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Microstereolit hography and Other Fabrication Techniques for 3d Mems, Hardcove...
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Located in: Escanaba, Michigan, United States
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eBay item number:324922152883
Item specifics
- Condition
- Book Title
- Microstereolithography and Other Fabrication Techniques for 3d Me
- ISBN
- 9780471521853
About this product
Product Identifiers
Publisher
Wiley & Sons, Incorporated, John
ISBN-10
047152185X
ISBN-13
9780471521853
eBay Product ID (ePID)
13038302383
Product Key Features
Number of Pages
274 Pages
Language
English
Publication Name
Microstereolithography and Other Fabrication Techniques for 3d Mems
Publication Year
2001
Subject
Electronics / Microelectronics, Electronics / Circuits / General, Industrial Technology
Type
Textbook
Subject Area
Technology & Engineering
Format
Hardcover
Dimensions
Item Height
0.8 in
Item Weight
19 Oz
Item Length
9.1 in
Item Width
6.3 in
Additional Product Features
Intended Audience
Scholarly & Professional
LCCN
00-069344
Dewey Edition
21
Reviews
"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written." (Engineering Science & Education Jnl. April 2002)
Illustrated
Yes
Dewey Decimal
621.381
Table Of Content
Preface. Microelectromechanical Systems. Fundamentals of Polymer Synthesis for MEMS. Stereolithography (SL). Microstereolithography Techniques I-Scanning Method. Microstereolithography Techniques II-Projection Method. Polymeric MEMS Architecture with Silicon, Metal, and Ceramics. Combined Silicon and Polymeric Structures. Micromolding. Applications. Appendix 1: Some Polymers for MEMS. Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography. Index.
Synopsis
Microelectromechanical systems (MEMS) refer to a collection of micro--sensors and actuators which can react to environmental change under micro-circuit control. Stereo-micro-lithography (SML) is one of number of micro-machining techniques for the fabrication of MEMS., The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS. ∗ A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques ∗ Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units. ∗ Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. ∗ Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source., Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung., This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
LC Classification Number
TK7875.V37 2001
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