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A User's Guide to Vacuum Technology - Hardcover By O'Hanlon, John F. - VERY GOOD

US $19.99
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Condition:
Very Good
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eBay item number:156863599433

Item specifics

Condition
Very Good: A book that has been read but is in excellent condition. No obvious damage to the cover, ...
Brand
Unbranded
Book Title
A User's Guide to Vacuum Technology
MPN
Does not apply
ISBN
9780471812425

About this product

Product Identifiers

Publisher
Wiley & Sons, Incorporated, John
ISBN-10
0471812420
ISBN-13
9780471812425
eBay Product ID (ePID)
531358

Product Key Features

Number of Pages
512 Pages
Publication Name
User's Guide to Vacuum Technology
Language
English
Subject
Mechanical, General
Publication Year
1989
Type
Textbook
Subject Area
Technology & Engineering
Author
John F. O'hanlon
Format
Hardcover

Dimensions

Item Height
1.1 in
Item Weight
28.2 Oz
Item Length
9.4 in
Item Width
6.3 in

Additional Product Features

Edition Number
2
Intended Audience
Scholarly & Professional
LCCN
88-027327
TitleLeading
A
Dewey Edition
21
Illustrated
Yes
Dewey Decimal
621.5/5
Table Of Content
Partial table of contents: Vacuum Technology. Gas Properties. Gas Flow. Gas Release from Solids. MEASUREMENT. Pressure Gauges. Flow Meters. Pumping Speed. Residual Gas Analyzers. Interpretation of RGA Data. PRODUCTION. Mechanical Pumps. Turbomolecular Pumps. Diffusion Pumps. Vacuum Pump Fluids. Getter and Ion Pumps. Cryogenic Pumps. MATERIALS. Materials in Vacuum. Joints, Seals, and Components. Lubrication. SYSTEMS. High Vacuum Pump Systems. Ultrahigh Vacuum Systems. High Flow Systems. Leak Detection. Appendices. Index.
Synopsis
An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.
LC Classification Number
TJ940.O37 1989

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